铌酸锂具有良好的非线性光学性质,可用作光波导材料,或用于制作中低频声表滤波器、大功率耐高温超声换能器等。铌酸锂掺杂技术如今被广泛应用。Mg:LN提高抗激光损伤阈值,优化在非线性光学领域的应用;Nd:Mg:LN晶体可实现自倍频效应;Fe:LN晶体可用于光学体全息存储。
铌 酸 锂 / 钽 酸 锂 晶 片
Lithium Niobate / Lithium Tantalae Wafers
铌酸锂具有良好的非线性光学性质,可用作光波导材料,或用于制作中低频声表滤波器、大功率耐高温超声换能器等。铌酸锂掺杂技术如今被广泛应用。Mg:LN 提高抗激光损伤阈值,优化在非线性光学领域的应用;Nd:Mg:LN 晶体可实现自倍频效应;Fe:LN 晶体可用于光学体全息存储。钽酸锂具有优良的压电、铁电、声光及电光效应,广泛用于谐振器、滤波器、换能器等电子通讯器件,及高频声表面波器件。
Lithium Niobate has good nonlinear optical properties and can be used as optical waveguide material, or to produce medium and low frequency SAW filter, high power high temperature resistant ultrasonic transducer, etc. Lithium niobate doping is now widely used, such as Mg:LN, Nd:Mg:LN, Fe:LN. Lithium Tantalate has good piezoelectric, ferroelectric, acousto-optic and electro-optic effects. It is widely used in resonators, filters, transducers, as well as high-frequency surface acoustic wave devices.
材料特性 Material Characteristics
Material 材料 | 3" 4" 6" 8" LN wafer Saw/Optical grade 铌酸锂晶片(声表级/光学级) | 3" 4" 6" LT wafer Saw/Optical grade 钽酸锂晶片(声表级/光学级) |
Orientation 切型 | X/Z/Y41°/Y64°/Y128°/YZ/YX or Customized 可定制 | X112°/Y28°/Y36°/Y42°/YZ or Customized 可定制 |
Curie Temp 居里温度 | 1142°C±3°C | 605°C±3°C |
Doped with 掺杂 | Zn, MgO single or double doped available | Fe |
Single Domain 单筹 | Completed Polarization/Reducted 完成极化/黑化 |
加工能力 processing capacity
Surface finish 表面处理 | single or double sides polish (DLP/SLP/ SSP/DSP all available ) 单面抛光/双面抛光/单面研磨/双面研磨 | |
Thickness 厚度 | 0.18/0.25/0.35/0.50/1.00 + mm | 0.25/0.35/0.50/1.00+mm |
TTV | < 1~5µm | |
BOW | ± (25µm ~40um ) | |
Warp | <= 35µm | |
LTV (5mmx5mm) | <1.5 um | |
PLTV(<0.5um) | ≥98% (5mm*5mm) with 2mm edge excluded | |
Edge 边缘 | Compl't with SEMI M1.2@with GC800# .regular at C typed | |
Orientation flats 定向平台 | available, per request 根据要求定制 | |
Polished side Ra 抛光面 | Roughness Ra<=5A | |
Back Side Criteria 反面 | Roughness Ra:0.5-1.0µm GC#1000 | |
Edge Rounding 倒角 | Compliant with SEMI M1.2 Standard/refer to IEC62276 | |
Cracks, saw marks, stains | None |